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Applications

Semiconductor

APPLICATIONS
INDUSTRY
(FACILITY)
SERVICE PARAMETER RANGE BACKGROUND TELEDYNE MODEL
Bulk gas analysis Ultra high purity inert gases used in fabrication of wafers
PPB O2 0-50 ppb UHP - N2, H2, AR and He BDS-3000 Series
1. Gas phase etching - blanketing
2. Annealing furnace - blanketing
3. Deposition of Dopant - carrier gas
4. Pipe line verification - leak check
5. Analysis at point of use - at tool location
Excimer laser system Laser exciter / F2 mixer gases Percent F2 0-2, 0-7% He or Neon Series 6000 UV


Applications by industry - Petrochemical | Oil and Gas | Air Separation
Power Generation | Cement | Refining | Food and Beverage | Pharmaceutical
Steel | Pulp and Paper | Semiconductor | Various

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Teledyne Analytical Instruments • 16830 Chestnut St • City of Industry, CA 91748 • USA