Ultra high purity inert gases used in fabrication of wafers
1. Gas phase etching - blanketing
2. Annealing furnace - blanketing
3. Desposition of Dopant - carrier gas
4. Pipe line verification - leak check
5. Analysis at point of use - at tool location
PPB O2
0-50 ppb
UHP - N2, H2, AR and He
